JPS6437464U - - Google Patents
Info
- Publication number
- JPS6437464U JPS6437464U JP11578387U JP11578387U JPS6437464U JP S6437464 U JPS6437464 U JP S6437464U JP 11578387 U JP11578387 U JP 11578387U JP 11578387 U JP11578387 U JP 11578387U JP S6437464 U JPS6437464 U JP S6437464U
- Authority
- JP
- Japan
- Prior art keywords
- gas nozzle
- nozzle
- sih
- reaction chamber
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000004767 nitrides Chemical class 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987115783U JPH0512280Y2 (en]) | 1987-07-27 | 1987-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987115783U JPH0512280Y2 (en]) | 1987-07-27 | 1987-07-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6437464U true JPS6437464U (en]) | 1989-03-07 |
| JPH0512280Y2 JPH0512280Y2 (en]) | 1993-03-29 |
Family
ID=31357744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987115783U Expired - Lifetime JPH0512280Y2 (en]) | 1987-07-27 | 1987-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0512280Y2 (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5945926U (ja) * | 1982-09-20 | 1984-03-27 | 富士通株式会社 | 化学気相成長装置 |
| JPS6082668A (ja) * | 1983-10-07 | 1985-05-10 | Hitachi Tokyo Electronics Co Ltd | ガス流量制御装置 |
| JPS61269307A (ja) * | 1985-05-24 | 1986-11-28 | Hitachi Ltd | Ｃｖｄ装置 |
-
1987
- 1987-07-27 JP JP1987115783U patent/JPH0512280Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5945926U (ja) * | 1982-09-20 | 1984-03-27 | 富士通株式会社 | 化学気相成長装置 |
| JPS6082668A (ja) * | 1983-10-07 | 1985-05-10 | Hitachi Tokyo Electronics Co Ltd | ガス流量制御装置 |
| JPS61269307A (ja) * | 1985-05-24 | 1986-11-28 | Hitachi Ltd | Ｃｖｄ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0512280Y2 (en]) | 1993-03-29 |